The Verios 5 XHR SEM features an ultra-high-brightness electron source with next-generation UC+ monochromator technology to reduce the beam energy spread below 0.2 eV for beam currents up to 100 pA. This enables sub-nanometer resolution and highest surface sensitivity at low landing energies. The innovative Thermo Scientific Elstar™ Electron Column provides the foundation of the system’s unprecedented high resolution imaging capability. It offers the best nanoscale details, using the widest range of working conditions, whether operating at 30 keV in STEM mode to access structural information or at lower energies to obtain charge-free, detailed information from the surface. With its immersion mode and unique triple detection system located inside the column, the system is designed for simultaneous detector acquisition for angular and energy selective SE and BSE imaging.
Fast access to the most detailed nanoscale information is guaranteed, not only top-down, but also on tilted specimens or cross sections.Additional below-the lens detectors and the electron beam deceleration mode ensure the fast and easy simultaneous collection of all signals to reveal the smallest features in material surfaces or cross sections. Fast, accurate and reproducible results are obtained thanks to the unique design of the Elstar Column, which includes constant power lenses for higher thermal stability and electrostatic scanning for higher deflection linearity and speed.